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/Title (Hybrid Integrated Platforms for Silicon Photonics)
/Author (Di Liang 1,*, Gunther Roelkens 2, Roel Baets 2 and John E. Bowers 1)
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/Subject (A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics.)
/Keywords (hybrid integration; wafer bonding; silicon photonics)
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hybrid integration; wafer bonding; silicon photonics
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Hybrid Integrated Platforms for Silicon Photonics
A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics.
hybrid integration
wafer bonding
silicon photonics
Di Liang
Gunther Roelkens
Roel Baets
John E. Bowers
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