%PDF-1.4
%
2 0 obj
<>
endobj
4 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
3 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
1 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
5 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
6 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
7 0 obj
<>>>/BBox[0 0 809.97 612]/Length 213>>stream
x}n0w?ōEvHZ*@ #^aСN߇jF)kchBɦ6
{~DCv:#zsb@~|:٢ !TL.]6üD1't=N})VIcpaZC8FznB_T^m ^9V5ˉ_S
endstream
endobj
8 0 obj
<>stream
iText 2.1.7 by 1T3XT
2016-10-13T13:58:26ZArbortext Advanced Print Publisher 9.0.114/W2016-08-26T19:20:29+05:30
aip.orgtrue10.1063/1.49619362016-08-29III/V nano ridge structures for optical applications on patterned 300 mm silicon substrate
10.1063/1.4961936http://dx.doi.org/10.1063/1.4961936
doi:10.1063/1.4961936III/V nano ridge structures for optical applications on patterned 300 mm silicon substrateB. KunertW. GuoY. MolsB. TianZ. WangY. ShiD. Van ThourhoutM. PantouvakiJ. Van CampenhoutR. LangerK. Barla
2016-08-29trueaip.org10.1063/1.4961936
endstream
endobj
9 0 obj
<>stream
x+ |
endstream
endobj
10 0 obj
<>stream
xS**T0T0 Bi y\'
endstream
endobj
11 0 obj
<>stream
x+ |
endstream
endobj
12 0 obj
<>stream
xS**T0T0 Bi ye(
endstream
endobj
13 0 obj
<>stream
x+ |
endstream
endobj
14 0 obj
<>stream
xS**T0T0 Bi yS&
endstream
endobj
15 0 obj
<>stream
x+ |
endstream
endobj
16 0 obj
<>stream
xS**T0T0 Bi y8#
endstream
endobj
17 0 obj
<>stream
x+ |
endstream
endobj
18 0 obj
<>stream
xS**T0T0 Bi yJ%
endstream
endobj
19 0 obj
<>stream
x+ |
endstream
endobj
20 0 obj
<>stream
xS**T0T0 Bi yA$
endstream
endobj
21 0 obj
<>/XObject<>>>/Annots[29 0 R 30 0 R 31 0 R 32 0 R 33 0 R 34 0 R 35 0 R 36 0 R 37 0 R 38 0 R 39 0 R 40 0 R 41 0 R 42 0 R 43 0 R 44 0 R 45 0 R 46 0 R 47 0 R 48 0 R 49 0 R 50 0 R 51 0 R]/Parent 52 0 R/MediaBox[0 0 612 809.97]>>
endobj
22 0 obj
<>stream
xWnFoC-l
uGDK
Bl/VF?3zDZ"mAPϽ̭}p+5v4UVͭx-Ӎ]fأmƩ4.)0N-$vL^ϭ4Lfe&8\_9Fޙrp (#ʈFn4(&N4цč1QӞ[Fשpixpt~GA)jf*sN䔧,5Rmcf*P=W>s|.1bs 6sN~'\]sR,JU~}wxD``O' YLȪݺL̾7*Q>)[(+dc?-id?́5O#[Z~`<nH2D*T8<.]LyGHll}?v1ƌ˽j3D=bO7DZ'.c
&tz<Ulǯ5N0Rh1ؔf/TZ_ЃND,K@\:Fe4Ѡ'5MS!XeSG(}[O*T99fB?9qϜϩF9ȁ1oY}PImp|.btu$,h$yCֽA<$?ImKeLFu08qn3cAe"Ăr@->B56%TK7?SlY@6PHr/6=rwzZܯRuu
K6Z[L" (+a
I*
NU8b%s(0@wS0.gM'D8pGvOx~!>5\qrLHMKHCZ4!-EBZHkůR[8Ŕc{
KbLir5k}/ogmk,*&
)FOPh˫#<*ҢK;di*čFh벹Do*u 145G;drbQLS:X&Eqsѣ)2~hӢY ̊!;_YؑvG:c5B$vwkNf"Oj:d['Gc)3>
endobj
53 0 obj
<>/Type/Font/BaseFont/CRLFCR+ArialUnicodeMS-Bold/FontDescriptor 55 0 R/W[3[277] 18[277 556 556] 22[556] 25[556 556 556 556] 36[722] 44[277] 57[666] 68[556 610 556 610 556 333 610] 76[277] 79[277 889 610 610 610] 85[389 556 333 610] 92[556] 3380[100]]/CIDToGIDMap/Identity>>
endobj
55 0 obj
<>
endobj
56 0 obj
<>stream
xXUו7Ο{"%PX"!JB(J)RB
5:Z>j%JֱYk}|퍵u8:uq2:imu2{gm&73O~g^{>g2(@%?3'w"eS.x7w%Qҋ]O-0*H4LBB3?3Hu?!ʞ]E
2"^ѳ
%'?zu}qg LAAΦL#=/{#W?WVPxcՏV}>\PE
_@s7r;=eݛyOƜwϺ+83}FiS$ON>2
=cFh#MC鏴3+2k>)̔9O/'DS5DesbYjCVV~<8gaՋ:BoLX(HSFF0dfG%!=#<&Ɓ?,@"-xBwON$1_XRb#!J}!DӘ
C@dTm2R!cy|\Lݙ;F;ڢ:j4cΚ9kRTB?'^J$@*^O@J'^26TL\K&9),BFwl
9S9"/"ӡn"$pLlQ{/y@2$vdv,ji
YYYBw=V$4uPx,욳qm
q]O412+H`Ѕ$M?5g<3k mI0YPrܱaS58eC愾νE/&9fFヒE^\=gS/aY]nnZؕ0 :[6##Y".Ȉk"c@GBe
PXIIf.9mO>;XCA2YԜ?A~AHSɯgcucuc| wt?m
6F¯j=1#xʶ5k*3Ti[@s3湅ms7~p(|Pr[ [ecO|rN"Xff,f9_9c21V3;i|^9eNQҿ2Ƿ2Si̠šBi9 VrMr朿%|4|9)0oxrxEqm'&BtN'Reҭ