%PDF-1.4
%
1 0 obj
<>stream
application/pdfIEEEIEEE Journal of Selected Topics in Quantum Electronics;2023;29;3: Photon. Elec. Co-Inte. and Adv. Trans. Print.;10.1109/JSTQE.2022.3222686Micro-Transfer Printing for Heterogeneous Si Photonic Integrated CircuitsIntegrated optoelectronicsphotodiodesprintingsemiconductor laserssilicon on insulator technologywafer-scale integrationwaveguide componentsGunther RoelkensJing ZhangLaurens BogaertMaximilien BilletDongbo WangBiwei PanClemens J. KruckelEmadreza SoltanianDennis MaesTom VanackereTom VandekerckhoveStijn CuyversJasper De WitteIsaac Luntadila LufungulaXin GuoHe LiSenbiao QinGrigorij MuliukSarah UvinBahawal HaqCamiel Op de BeeckJeroen GoyvaertsGuy LepagePeter VerheyenJoris Van CampenhoutGeert MorthierBart KuykenDries Van ThourhoutRoel Baets
IEEE Journal of Selected Topics in Quantum Electronics1 May-June 20233: Photon. Elec. Co-Inte. and Adv. Trans. Print.10.1109/JSTQE.2022.32226862914
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endstream
endobj
2 0 obj
<>
endobj
3 0 obj
<>/C[0 1 1]/Subtype/Link/Type/Annot/H/I/Border[0 0 0]/Rect[153.984 663.207 164.958 673.209]>>
endobj
4 0 obj
<>/ExtGState<>/ProcSet[/PDF/Text/ImageC/ImageB/ImageI]/Font<>/XObject<>>>/CropBox[0 0 594 792]/Parent 17 0 R/Rotate 0/MediaBox[0 0 594 792]>>
endobj
5 0 obj
<>stream
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