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Authors: K. Naessens, P. Van Daele, R. Baets
Title: Flexible Fabrication of Microlenses in Polymers with Excimer Laser Ablation
Format: National Conference Proceedings
Publication date: 12/2001
Journal/Conference/Book: 2nd FTW PHD Symposium, Interactive poster session, paper nr. 53 (proceedings available on CD-Rom)
Location: Gent, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (1.7MB) (1.7MB)


Excimer laser ablation is a flexible microfabrication technique, suitable for surface structuring of polymers because of their high UV absorption and non-thermal ablation behaviour. Due to the non-contact and direct-write nature of the process, laser ablation is a very attractive technology allowing realization of micro-optical functionality on top of opto-electronic components in a late phase of a heterogeneous assembly.
In this paper we propose a flexible fabrication technique for microlenses with excimer laser ablation and report on the present status of experimental results on microlenses ablated in polycarbonate. Based on scanning a polymer surface with an excimer beam along well-chosen multiple concentric contours, a microlens of arbitrary shape can be realized. The choice of ablation parameters and the selection of scanning paths are discussed. Optical performance and lens surface quality are evaluated by imaging experiments, scanning electron microscopy and profilometer measurements.

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