Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services


Publication detail

Authors: J. Schrauwen, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator
Format: International Journal
Publication date: 10/2006
Journal/Conference/Book: Applied Physics Letters
Volume(Issue): 89 p.141102
DOI: 10.1063/1.2356311
Citations: 19 ( - last update: 26/11/2023)
17 (OpenCitations - last update: 3/5/2023)
Look up on Google Scholar
Download: Download this Publication (261KB) (261KB)


Focused-ion-beam technology is a versatile micro- and nanostructuring tool, in which material is sputtered locally by a finely focused ion beam. But for photonic applications this process has the inherent inconvenience of generating optical losses due to ion induced damage. Process optimization is needed to reduce these losses. In this letter the authors present the focused-ion-beam fabrication of shallow gratings in silicon-on-insulator waveguides for the coupling of light to a vertically positioned fiber. Using Al2O3 as mask and I2 as selective etchant this resulted in a 24% fiber-to-chip coupling efficiency, which is comparable to similar devices fabricated with conventional etching techniques.

Related Research Topics

Related Projects

Citations (OpenCitations)

Back to publication list