The ability forforming complex three dimensionalshapes isone ofthe primeadvantages
of focused ion beam based micromachining. We have used this technique to fabricate
to 63% for fiber couplers with 167 nm slits under an angle of 59° to the surface normal.
We have fabricated these devices with focused-ion-beam. The dimensions of the fabri-
cated structures are similar to the design, but we have not measured efficiencies larger
than 20%. The difference with the simulated value is probably caused by ion induced
damage inthe Si crystal.
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