| Authors: | J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets | | Title: | Compact InAlAs/InGaAs Metal-Semiconductor-Metal Photodetectors Integrated on Silicon-on-Insulator Waveguides | | Format: | International Journal | | Publication date: | 10/2007 | | Journal/Conference/Book: | IEEE Photonics Technology Letters
| | Volume(Issue): | 19(19) p.1484-1486 | | DOI: | 10.1109/lpt.2007.903767 | | Citations: | 60 (Dimensions.ai - last update: 15/12/2024)
48 (OpenCitations - last update: 3/5/2024)
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Abstract
We present measurement results of compact and efficient InAlAs/InGaAs metal-semiconductor-metal photo-detectors integrated on silicon-on-insulator (SOI) waveguides. These thin film devices are heterogeneously integrated on the SOI substrate by means of low-temperature die-to-wafer bonding using DVS-BCB. The responsivity of a 30ìm long detector is 1.0A/W at a wavelength of 1550nm and the dark current is 4.5nA at a bias voltage of 5V. Related Research Topics
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