Authors: | S. Scheerlinck, D. Van Thourhout, R. Baets | Title: | UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator | Format: | International Conference Proceedings | Publication date: | 7/2007 | Journal/Conference/Book: | 2007 Digest of the IEEE/LEOS Summer Topicals Meetings
| Volume(Issue): | p.MB3.4 | Location: | Oregon, United States | DOI: | 10.1109/leosst.2007.4288342 | Citations: | 1 (Dimensions.ai - last update: 6/10/2024) Look up on Google Scholar
| Download: |
(1.3MB) |
Abstract
Fiber-to-waveguide gold grating couplers are fabricated using UV-based Nano
Imprint Lithography and lift-off on top of an unprocessed Silicon-on-Insulator chip. Over 22%
efficiency and a 1dB bandwidth of 36nm is demonstrated in the telecom band. Related Research Topics
Related Projects
|
|