| Authors: | U. Plachetka, A. Kristensen, S. Scheerlinck, N. Whitbread, J. Huskens, N. Koo, H. Kurz | | Title: | Fabrication of Photonic Components by Nanoimprint Technology within ePIXnet | | Format: | International Journal | | Publication date: | 1/2008 | | Journal/Conference/Book: | Microelectronic Engineering
| | Editor/Publisher: | Elsevier, | | Volume(Issue): | 85(5-6) p.886-889 | | DOI: | 10.1016/j.mee.2008.01.013 | | Citations: | 9 (Dimensions.ai - last update: 14/4/2024)
6 (OpenCitations - last update: 3/5/2024)
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Abstract
The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications. Related Research Topics
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