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Authors: N.A Yebo, P. Lommens, Z. Hens, R. Baets
Title: An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film
Format: International Journal
Publication date: 5/2010
Journal/Conference/Book: Optics Express
Editor/Publisher: OSA, 
Volume(Issue): 18(11) p.11859-11866
DOI: 10.1364/oe.18.011859
Citations: 139 ( - last update: 19/5/2024)
85 (OpenCitations - last update: 3/5/2024)
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Optical structures fabricated on silicon-on-insulator technology provide a convenient platform for the implementation of highly compact,versatile and low cost devices. In this work, we demonstrate the promise of this technology for integrated low power and low cost optical gas sensing. A room temperature ethanol vapor sensor is demonstrated using a ZnO nanoparticle film as a coating on an SOI micro-ring resonator of 5 μm in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of around 3 nm diameter. The porous nature of the coating provides a large surface area for gas adsorption. The ZnO refractive index change upon vapor adsorption shifts the microring resonance through evanescent field interaction. Ethanol vapor
concentrations down to 100 ppm are detected with this sensing configuration and a detection limit below 25 ppm is estimated.

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