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Authors: G. Yurtsever, K. Komorowska, R. Baets
Title: Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography
Format: International Conference Proceedings
Publication date: 9/2011
Journal/Conference/Book: Conference on Optical Coherence Tomography and Coherence Techniques V
Editor/Publisher: Proceedings of SPIE-OSA Biomedical Optics, 
Volume(Issue): 8091(80910T)
Location: Munich, Germany
DOI: 10.1117/12.889920
Citations: 11 ( - last update: 9/6/2024)
6 (OpenCitations - last update: 3/5/2024)
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We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon
waveguides of the interferometer are designed with GVD less than 50 ps/ The footprint of the device is 0.5mm x 3mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

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