| Authors: | G. Yurtsever, K. Komorowska, R. Baets | | Title: | Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography | | Format: | International Conference Proceedings | | Publication date: | 9/2011 | | Journal/Conference/Book: | Conference on Optical Coherence Tomography and Coherence Techniques V
| | Editor/Publisher: | Proceedings of SPIE-OSA Biomedical Optics, | | Volume(Issue): | 8091(80910T) | | Location: | Munich, Germany | | DOI: | 10.1117/12.889920 | | Citations: | 11 (Dimensions.ai - last update: 15/12/2024)
6 (OpenCitations - last update: 3/5/2024)
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Abstract
We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon
waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5mm x 3mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed. Related Research Topics
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Citations (OpenCitations)
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