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Authors: E. Hallynck, P. Bienstman
Title: Integrated optical pressure sensors in silicon-on-insulator
Format: International Journal
Publication date: 4/2012
Journal/Conference/Book: IEEE Photonics Journal
Volume(Issue): 4(2) p.443-450
DOI: 10.1109/JPHOT.2012.2189614
Citations: 33 ( - last update: 3/12/2023)
26 (OpenCitations - last update: 10/5/2023)
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An optical pressure sensor can be useful in many applications where electronics fall short (e.g. explosive environments). We have fabricated and characterized compact, integrated optical pressure sensors on a silicon-on-insulator platform using ring resonators and Mach-Zehnder interferometers. The silicon substrate is locally etched using KOH to produce very thin membranes of 3.28 ┬Ám. Measurements have shown that spectral features in our devices can shift up to 370 pm going from 0 to 80 kPa.

Citations (OpenCitations)

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