Authors:	N.A Yebo, S. P. Sree, E. Levrau, C. Detavernier, Z. Hens, J. A. martens, R. Baets
Title:	Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator
Format:	International Journal
Publication date:	5/2012
Journal/Conference/Book:	Optics Express
Editor/Publisher:	OSA,
Volume(Issue):	20(11) p.11855-11862
DOI:	10.1364/oe.20.011855
Citations:	69 (Dimensions.ai - last update: 14/4/2024) 31 (OpenCitations - last update: 10/5/2024) Look up on Google Scholar
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Abstract

Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH3 with selectivity relative to CO2. The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH3 within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications.