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Authors: E. Hallynck, P. Bienstman
Title: Integrated Differential Pressure Sensor in Silicon-on-Insulator
Format: International Conference Proceedings
Publication date: 9/2012
Journal/Conference/Book: IEEE Photonics Conference 2012
Volume(Issue): p.445-446
Location: Burlingame, California, United States
DOI: 10.1109/ipcon.2012.6358684
Citations: Look up on Google Scholar
Download: Download this Publication (1.4MB) (1.4MB)

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