| Authors: | S. Selvaraja, P. De Heyn, G. Winroth, P. Ong, G. Lepage, C. Cailler, A. Rigny, K. Bourdelle, W. Bogaerts, D. Van Thourhout, J. Van Campenhout, P. Absil | | Title: | Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform | | Format: | International Conference Proceedings | | Publication date: | 3/2014 | | Journal/Conference/Book: | Optical Fiber Communication Conference (OF2014)
| | Volume(Issue): | p.Th2A.33 | | Location: | San Francisco, United States | | DOI: | 10.1364/ofc.2014.th2a.33 | | Citations: | 72 (Dimensions.ai - last update: 14/4/2024)
22 (OpenCitations - last update: 19/4/2024)
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Abstract
Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-ó) within-wafer and within-device of 6.1nm and 1.2nm respectively. Related Research Topics
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