Authors: | M. Hsu, A. Marinelli, C. Merckling, M. Pantouvaki, J. Van Campenhout, P. Absil, D. Van Thourhout | Title: | Orientation-dependent electro-optical response of BaTiO3 on SrTiO3-buffered Si(001) studied via spectroscopic ellipsometry | Format: | International Journal | Publication date: | 6/2017 | Journal/Conference/Book: | Optical Materials Express
| Editor/Publisher: | OSA, | Volume(Issue): | 7(6) p.291887 | DOI: | 10.1364/OME.7.002030 | Citations: | 20 (Dimensions.ai - last update: 25/8/2024) 18 (OpenCitations - last update: 27/6/2024) Look up on Google Scholar
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Abstract
To design a high performance BaTiO3 (BTO)-integrated Si modulator, understanding how BTO domain orientations influence its electro-optical (EO) properties is crucial. The 100-nm-thick BTO films with c-oriented and a-oriented domains are obtained by exploiting various thickness of SrTiO3 buffer layers grown on Si(001) substrates. Then, the electro-optical behavior for 2 differently oriented samples is analyzed using spectroscopic ellipsometry. |
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