| Authors: | W. Bogaerts, Y. Xing, U. Khan | | Title: | Layout-Aware Variability Analysis, Yield Prediction and Optimization in Silicon Photonic Circuits | | Format: | International Journal | | Publication date: | 9/2019 | | Journal/Conference/Book: | IEEE Journal on Selected Topics in Quantum Electronics
| | Editor/Publisher: | OSA, | | Volume(Issue): | 25(5) p.paper 6100413 | | DOI: | 10.1109/JSTQE.2019.2906271 | | Citations: | 44 (Dimensions.ai - last update: 14/4/2024)
5 (OpenCitations - last update: 19/4/2024)
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Abstract
We present a simulation framework for evaluating the effect of location-dependent variability in photonic integrated circuits. The framework combines a fast circuit simulator with circuit layout information and wafer maps of linewidth and layer thickness variations to estimate the statistics of the circuit performance through Monte-Carlo simulations. We illustrate the use of the tool on ring resonator filters, a design sweep of Mach-Zehnder lattice filters, and the tolerance optimization of a Mach-Zehnder interferometer, and show how variability aware design should become an essential part in future photonic circuit design. Related Research Topics
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