| Authors: | Y. Xing, M. Wang, A. Ruocco, J. Geessels, U. Khan, W. Bogaerts | | Title: | A Compact Silicon Photonics Circuit to Extract Multiple Parameters for Process Control Monitoring | | Format: | International Journal | | Publication date: | 2/2020 | | Journal/Conference/Book: | OSA Continuum
| | Editor/Publisher: | OSA, | | Volume(Issue): | 3(2) p.379-390 | | DOI: | 10.1364/OSAC.383711 | | Citations: | 12 (Dimensions.ai - last update: 14/4/2024)
2 (OpenCitations - last update: 19/4/2024)
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Abstract
We present a compact circuit to extract multiple parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with lesser measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm. Related Research Topics
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