|H. Becker, C.J. Krückel, D. Van Thourhout, M.J.R. Heck
|Simulation and Experimental Characterization of Compact Out-of-Plane Focusing Grating Couplers on 220 nm-SOI platform
|International Conference Presentation
|European Conference on Integrated Optics
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We present the design and characterization of compact out-of-plane focusing grating couplers on a
silicon photonic platform, based on the fabrication restrictions for standard 193 nm UV lithography.
The characterization by spatially sweeping a lensed fibre across the grating couplers clearly reveals
the focusing behaviour and validates the design based on phase matching conditions for the one- and
two-dimensional case. To our knowledge, this makes these grating couplers the first experimentally
demonstrated 2D out-of-plane focusing grating couplers on a standard 220 nm-SOI platform. These
grating couplers can find application as optical photonic layer couplers in optical sensing, as vertical
interconnects, or to address spintronic memory elements.