| Authors: | A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack | | Title: | Continuously tunable Silicon Photonic MEMS 2x2 Power Coupler | | Format: | International Conference Proceedings | | Publication date: | 6/2021 | | Journal/Conference/Book: | 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers),
| | Volume(Issue): | p.B5-5B6 | | DOI: | 10.1109/Transducers50396.2021.9495551 | | Citations: | 1 (Dimensions.ai - last update: 15/12/2024)
1 (OpenCitations - last update: 1/7/2024)
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Abstract
The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2x2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs. Related Research Topics
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