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Authors: P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, H. Sattari, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason
Title: Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
Format: International Journal
Publication date: 11/2021
Journal/Conference/Book: Optics Letters
Volume(Issue): 46(22) p.5671-5674
DOI: 10.1364/OL.436288
Citations: 58 ( - last update: 16/6/2024)
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Programmable photonic integrated circuits are emerging as an attractive platform for applications such as quantum information processing and artificial neural networks. However, current programmable circuits are limited in scalability by the lack of low-power and low-loss phase shifters in commercial foundries. Here, we demonstrate a compact phase shifter with low-power photonic MEMS (micro-electro-mechanical systems) actuation on a silicon photonics foundry platform (IMEC's iSiPP50G). The device attains (2.9pi +- pi) phase shift at 1550nm, with an insertion loss of (0.33 + 0.15 - 0.10) dB, a Vpi of (10.7 + 2.2 - 1.4) V, and an Lpi of (17.2 + 8.8 - 4.3) um. We also measured an actuation bandwidth f-3dB of 1.03MHz in air. We believe that our demonstration of a low-loss and low-power photonic MEMS phase shifter implemented in silicon photonics foundry compatible technology lifts a main roadblock towards the scale-up of programmable photonic integrated circuits.

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