| Authors: | I. Ansari, K. De Geest, J. De Witte, T. Vandekerckhove, H. Rijckaert, E. Picavet, E. Lievens, G.F Feutmba, T. Van de Veire, B. Kuyken, J. Beeckman, D. Van Thourhout | | Title: | PZT micro-transfer printing for photonic MEMS | | Format: | International Conference Presentation | | Publication date: | Accepted for publication. Not yet published | | Journal/Conference/Book: | IEEE Photonics Conference
| | Editor/Publisher: | IEEE, | | Location: | Orlando, United States | | Citations: | Look up on Google Scholar
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Abstract
This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications. Related Research Topics
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