Authors:	I. Ansari, K. De Geest, J. De Witte, T. Vandekerckhove, H. Rijckaert, E. Picavet, E. Lievens, G.F Feutmba, T. Van de Veire, B. Kuyken, J. Beeckman, D. Van Thourhout
Title:	PZT micro-transfer printing for photonic MEMS
Format:	International Conference Presentation
Publication date:	Accepted for publication. Not yet published
Journal/Conference/Book:	IEEE Photonics Conference
Editor/Publisher:	IEEE,
Location:	Orlando, United States
DOI:	10.1109/IPC57732.2023.10360713
Citations:	Look up on Google Scholar
Download:	(1.3MB)

Abstract

This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications.

Related Research Topics

• Silicon optomechanics

Related Projects

• BOF GOA: PZT (Integration of novel thin films with photonic circuits for telecom, quantum optics and neuromorphic computing)