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Authors: K.B. Gylfason, P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus
Title: Wafer-Level Vacuum-Sealed Low-Power Photonic MEMS for Programmable Silicon Photonic Circuits
Format: International Conference Presentation
Publication date: 5/2023
Journal/Conference/Book: IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (invited)
Location: Jeyu, South Korea
Citations: Look up on Google Scholar

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