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Authors: P. Edinger, A.Y. Takabayashi, C. Antony, P. Verheyen, U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason
Title: A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
Format: International Conference Proceedings
Publication date: 7/2023
Journal/Conference/Book: Advanced Photonics Congress
Editor/Publisher: Optica Publishing Group, 
Volume(Issue): p.ITu1A.2 (2 pages)
Location: Busan,
DOI: 10.1364/IPRSN.2023.ITu1A.2
Citations: Look up on Google Scholar
Download: Download this Publication (576KB) (576KB)


Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.

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