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Authors: S. Selvaraja, E.Sleeckx, W. Bogaerts, M. Schaekers, P. Dumon, D. Van Thourhout, R. Baets
Title: Low loss amorphous silicon photonic wire and ring resonator fabricated by CMOS process
Format: International Conference Presentation
Publication date: 9/2007
Journal/Conference/Book: 33rd European conference on Optical communication (ECOC)
Volume(Issue): p.PD 2.2
Location: Berlin, Germany
Citations: Look up on Google Scholar
Download: Download this Publication (180KB) (180KB)

Abstract

We report low loss amorphous photonic wire loss of 3.5dB/cm. We also report compact racetrack ring resonators with Q factor greater than 20,000. The photonic circuit is fabricated with standard CMOS production tools.

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