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Authors: S. Kumar, S. Kumari, N. Le Thomas
Title: CMOS Fabricated Large Array of Free Standing Substrate-Less Photonic Crystal Cavities for Biosensing Applications
Format: International Journal
Publication date: 3/2017
Journal/Conference/Book: IEEE Photonics Journal
Volume(Issue): 9(2)
DOI: 10.1109/JPHOT.2017.2684627
Citations: 3 ( - last update: 16/6/2024)
1 (OpenCitations - last update: 19/4/2024)
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In this paper, we present a methodology to postprocess a large array of a few
hundred nanometer thin photonic membranes that were fabricated using complementary
metal-oxide-semiconductor (CMOS) technological platform. The postprocessing results in
local removal of the silicon substrate and of the buried oxide, which provides a free access
from both side of the photonic structures. The membranes are patterned with photonic crystal
cavities by deep ultraviolet lithography. We show that the proposed process is compatible
with the integration of micrometer-sized SU8-based polymer waveguides. These polymer
waveguides, together with high index contrast adiabatic nanometer-sized silicon inverted
tapers, act as spot size converters. In addition, although a significant number of processing
steps is required to achieve such free-standing substrate-less cavities, the quality (Q) factors
of the cavities that is of the order of a few thousand remains unaffected.

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