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Authors: S. Kumar, S. Kumari, N. Le Thomas
Title: CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications
Format: International Conference Proceedings
Publication date: 10/2017
Journal/Conference/Book: IEEE Photonics Conference (IPC)
Volume(Issue): p.493-501
Location: Lake Buena Vista, Florida, United States
DOI: 10.1109/ipcon.2017.8116198
Citations: Look up on Google Scholar
Download: Download this Publication (5.9MB) (5.9MB)


In this work we present a methodology to post-process a large array of a few hundred nanometer thin photonic membranes that were fabricated using complementary metal-oxide semiconductor (CMOS) technological platform. The post processing results in local removal of the silicon substrate and of the buried oxide (BOX), which provides a free access from both side of the photonic structures. The membranes are patterned with photonic crystal (PhC) cavities by deep ultraviolet (UV) lithography. We show that the proposed process is compatible with the integration of micrometer-sized SU8 based polymer waveguides. These polymer waveguides together with high index contrast adiabatic nanometer-sized silicon inverted tapers act as spot size converters. In addition, although a significant number of processing steps is required to achieve such free-standing substrate-less cavities, the quality (Q) factors of the cavities that is of the order of a few thousand remains unaffected.

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