|Authors: ||J. Zhang, L. Bogaert, M. Billet, D. Wang, B. Pan, S. Qin, E. Soltanian, S. Cuyvers, D. Maes, T. Vanackere, T. Vandekerckhove, S. Poelman, M. Kiewiet, I. Luntadila Lufungula, X. Guo, H. Li, J. De Witte, G. Lepage, P. Verheyen, J. Van Campenhout, B. Kuyken, G. Morthier, D. Van Thourhout, R. Baets, G. Roelkens|
|Title: ||Photonic integrated circuits realized using micro-transfer printing|
|Format: ||International Conference Proceedings|
|Publication date: ||7/2023|
|Citations: ||Look up on Google Scholar
We present our work on heterogeneous integration through micro-transfer printing of opto-electronic components and material films on Si/SiN photonics integrated circuits with minimal modification to the existing silicon photonics process flow.