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ePIXfab: Silicon Photonics Platform

Research Area: Silicon Photonics Process Technology

Main Researcher: Pieter Dumon

The Silicon Photonics Platform provides access to wafer-scale CMOS fabrication facilities for research and prototyping of photonic integrated circuits by academic and industrial R&D groups.

The mission of the Silicon Photonics Platform is to build a future for Silicon Photonics in Europe through the development of a fabless model for the fabrication of silicon photonic circuits based on existing CMOS labs and commercial foundries relying on European know-how.

This should be done by involving all interested parties, from academia, industy and policy-making bodies.

The Silicon Photonics platform has the following tasks:

  • A Facility Access Programme for Research and Prototyping: Making mature fabrication processes on high-end industrial CMOS tools available to many research groups or projects will ease the transition toward a fabless model. Also by sharing masks and processing, a dramatic cost reduction is possible.

  • A Roadmap for Silicon Photonics Technologies: Identifying the requirements for a fully-functional silicon photonic IC, and make plans for required process development

  • Commercial Manufacturing Routes: Links and possibilities for process transfers to commercial foundries should be looked into to enable future commercial fabrication of silicon photonic components in high volume.

  • Promotion and Lobbying for the field of Silicon photonics in the interest of Europe’s position in this field

Other people involved:

Related Research Projects


    International Journals

  1. S. Shekhar, W. Bogaerts, L. Chrostowski, J.E. Bowers, M. Hochberg, R. Soref, B.J. Shastri, Silicon Photonics -- Roadmapping the Next Generation, Nature Communications (invited), 15(1), p.article 751 (15 pages) doi:10.1038/s41467-024-44750-0 (2024).
  2. R. Baets, A. Rahim, Heterogeneous integration in silicon photonics: opportunities and challenges: opinion, Optica, 13(12), United States, p.3439-3444 doi:10.1364/OME.509531 (2023)  Download this Publication (2.2MB).
  3. A. Rahim, A. Hermans, B. Wohlfeil, D. Petousi, B. Kuyken, D. Van Thourhout, R. Baets, Taking Silicon Photonics Modulators to a Higher Performance Level: State of the Art and A Review of New Technologies, Advanced Photonics (invited), 3(2), p. 024003-1 to 024003-23 doi:10.1117/1.AP.3.2.024003 (2021)  Download this Publication (2.1MB).
  4. A. Rahim, J. Goyvaerts, B. Szelag, J-M. Fedeli, P. Absil, T. Aalto, M. Harjanne , C. Littlejohns, G. Reed, G. Winzer, S. Lischke, L. Zimmermann, D. Knoll, D. Geuzebroek, A. Leinse, M. Geiselmann, M. Zervas, H. Jans, A. Stassen, C. Dominguez, P. Munoz , D. Domenech , A. L. Giesecke, M. C. Lemme, R. Baets, Open-Access Silicon Photonics Platforms in Europe, IEEE Journal on Selected Topics in Quantum Electronics (invited), 25(5), p.paper 8200818 doi:10.1109/JSTQE.2019.2915949 (2019)  Download this Publication (4.5MB).
  5. M.A.Garcia-Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, I. Artundo, Silicon nitride photonic integration for visible light applications, Optics & Laser Technology (invited), 112(2019), p.299-306 doi:10.1016/j.optlastec.2018.10.059 (2019).
  6. A. Rahim, T. Spuesens, R. Baets, W. Bogaerts, Open-Access Silicon Photonics: Current Status and Emerging Initiatives, Proceedings of the IEEE (invited), 106(12), p.2313-2330 doi:10.1109/JPROC.2018.2878686 (2018)  Download this Publication (3.6MB).
  7. A. Subramanian, E.M.P. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P.C. Wuytens, D. Martens, F. Leo, W. Xie, U.D. Dave, M. Muneeb, Pol Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Zeger Hens, G. Roelkens, R. Baets, Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip , Photonics Research (invited), 5(3), p.B47 doi:10.1364/PRJ.3.000B47 (2015)  Download this Publication (1.5MB).
  8. W. Bogaerts, S. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, R. Baets, Silicon-on-Insulator Spectral Filters Fabricated with CMOS Technology, J. Sel. Top. Quantum Electron. (invited), 16(1), p.33-44 doi:10.1109/JSTQE.2009.2039680 (2010)  Download this Publication (2.3MB).
  9. F.Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O'Faolain, F. Dong, J.M. Fedeli, P. Dumon, L. Vivien, T.F. Krauss, G.T. Reed, J. Marti, High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode, Optics Express, 17(24), p.21986-21991 doi:10.1364/OE.17.021986 (2009)  Download this Publication (460KB).
  10. D. Neel, T. Benyattou, P. Sanchis, J. Marti, W. Bogaerts, P. Dumon, R. Baets, Optical near-field study of photonic crystal tapers, Applied Optics, 48(30), p.5718-5721 doi:10.1364/AO.48.005718 (2009)  Download this Publication (561KB).
  11. A. Kazmierczak, W. Bogaerts, E. Drouard, F. Dortu, P. Rojo-Romeo, F. Gaffiot, D. Van Thourhout, D. Giannone, Highly Integrated Optical 4x4 Crossbar in Silicon-on-Insulator Technology, Journal of Lightwave Technology, 27(16), p.3317-3323 doi:10.1109/JLT.2008.2010462  (2009)  Download this Publication (1.6MB).
  12. P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, L. Fulbert, Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab, Electronics Letters (invited), 45(12), p.581-582 doi:10.1049/el.2009.1353 (2009)  Download this Publication (53KB).
  13. L.Y.M. Tobing, P. Dumon, R. Baets, M.K. Chin, Box-like filter response based on complementary photonic bandgaps in 2D micro-resonator arrays, Optics Letters, 33(21), p.2512-2514 doi:10.1364/OL.33.002512 (2008).
  14. P. Dumon, W. Bogaerts, A. Tchelnokov, J.-M. Fedeli, R. Baets, Silicon Nanophotonics, Future Fab International (invited), 25, p.29-36 doi:10.3990/1.9789036543743 (2008)  Download this Publication (971KB).
  15. Landobasa Y.M. Tobing, Desmond C.S. Lim, P. Dumon, R. Baets, Mee-Koy Chin, Finesse enhancement in silicon-on-insulator two-ring resonator system, Applied Physics Letters, 92, p.101122 doi:10.1063/1.2894203 (2008)  Download this Publication (550KB).
  16. L.Y.M.A.L. Tobing, P. Dumon, R. Baets, D.C.S. Lim, M.-K. Chin, The Transmission Properties of One-Bus Two-Ring Devices, IEICE Transactions on Electronics (invited), E91-C(2), p.167-172 doi:10.1093/ietele/e91-c.2.167 (2008)  Download this Publication (1.7MB).
  17. S. Darmawan, Y.M. Landobasa, P. Dumon, R. Baets, M.K. Chin, Nested-Ring Mach-Zehnder Interferometer in Silicon-on-Insulator, IEEE Photonics Technology Letters, 20(1), p.9-11 doi:10.1109/lpt.2007.910618 (2008)  Download this Publication (442KB).
      International Conferences

    1. Z. Wang, M. Pantouvaki, G. Morthier, C. Merckling, J. Van Campenhout, D. Van Thourhout, G. Roelkens, Heterogeneous Integration of InP Devices on Silicon, the 28th International Conference on Indium Phosphide and Related Materials (IPRM) (invited), Japan, p.paper ThD1-1 (2016)  Download this Publication (379KB).
    2. P. Dumon, Silicon photonic integrated circuits, Nano Korea symposium 2013 (invited), South Korea, (2013).
    3. W. Bogaerts, P. Dumon, S. Selvaraja, D. Van Thourhout, R. Baets, Silicon nanophotonic waveguide components, Silicon Nanoelectronics and Photonics (SiNEP) 2009 (invited), Spain, p.33-34 (2009)  Download this Publication (381KB).
    4. T. Vallaitis, D. Hillerkuss, J.-S. Li, R. Bonk, N. Lindenmann, P. Dumon, R. Baets, M.L. Scimeca, I. Biaggio, F. Diederich, C. Koos, W. Freude, J. Leuthold, All-Optical Wavelength Conversion Using Cross-Phase Modulation at 42.7 Gbit/s in Silicon-Organic Hybrid (SOH) Waveguides, Photonics in Switching 2009, Italy, doi:10.1109/ps.2009.5307823 (2009)  Download this Publication (428KB).
    5. J.V. Galan, P. Sanchis, J. Marti, S. Marx, H. Schroeder, B. Mukhopadhyay, T. Tekin, S. Selvaraja, W. Bogaerts, P. Dumon, L. Zimmermann, CMOS compatible silicon etched V-grooves integrated with a SOI fiber coupling technique for enhancing fiber-to-chip alignment, 6th IEEE International Conference on Group IV Photonics, United States, p.ThP13 doi:10.1109/group4.2009.5338334 (2009)  Download this Publication (439KB).
    6. K. De Vos, P.P.P. Debackere, T. Claes, J. Girones, W.A.D. De Cort, E. Schacht, R. Baets, P. Bienstman, Label-free biosensors on silicon-on-insulator optical chips, SPIE Optics and Photonics (invited), 7397(37), United States, doi:10.1117/12.825648 (2009)  Download this Publication (1.5MB).
    7. W. Bogaerts, L. Liu, S. Selvaraja, J. Brouckaert, D. Taillaert, D. Vermeulen, G. Roelkens, D. Van Thourhout, R. Baets, Silicon nanophotonic waveguides and their applications, Asia-Pacific Optical Communications (APOC) 2008 (invited), 7134, China, p. 71341O-71341O-13 doi:10.1117/12.803440  (2008)  Download this Publication (1.1MB).
    8. C. Koos, J.M. Brosi, P. Vorreau, T. Vallaitis, P. Dumon, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diedrich, W. Freude, J. Leuthold, Silicon-organic hybrid (SOH) devices for nonlinear optical signal processing, OSA, United States, p.paper FMG6.pdf (1 paper) (2008)  Download this Publication (233KB).
    9. T. Tekin, H. Schröder, L. Zimmermann, P. Dumon, W. Bogaerts, Fibre-Array Optical Interconnection for Silicon Photonics, ECOC 2008, p.P.2.21 doi:10.1109/ecoc.2008.4729467 (2008)  Download this Publication (617KB).
    10. L.Y.M. Tobing, P. Dumon, R. Baets, M.-K. Chin, Defect modes in microring resonator arrays fabricated in silicon-on-insulator technology, Group IV Photonics, Italy, p.ThP13 doi:10.1109/group4.2008.4638173 (2008)  Download this Publication (535KB).
    11. L.Y.M. Tobing, P. Dumon, R. Baets, M.-K. Chin, Box-like filter response of two-dimensional array of microring resonator fabricated in silicon-on-insulator technology, Group IV Photonics, Italy, p.ThC7 doi:10.1109/group4.2008.4638157 (2008)  Download this Publication (432KB).
    12. L. Zimmermann, H. Schroeder, T. Tekin, W. Bogaerts, P. Dumon, g-Pack – a generic testbed package for Silicon photonic devices, Group IV Photonics, Italy, p.FB4 doi:10.1109/group4.2008.4638203 (2008)  Download this Publication (613KB).
    13. J. Brouckaert, G. Roelkens, S. Selvaraja, W. Bogaerts, P. Dumon, S. Verstuyft, D. Van Thourhout, R. Baets, Compact Silicon-on-Insulator Wavelength Demultiplexer with Heterogeneously Integrated InAlAs/InGaAs Photodetectors, ECOC 2008, Belgium, p.Tu.4.C.5 doi:10.1109/ecoc.2008.4729247 (2008)  Download this Publication (764KB).
    14. J. Roels, W. Van der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. Van Thourhout, R. Baets, A dynamic subwavelength pitch grating modulator for continuous Time-Of-Flight ranging with optical mixing, Optical MEMS&Nanophotonics 2008, Germany, p.176-177 doi:10.1109/omems.2008.4607886 (2008)  Download this Publication (302KB).
    15. J. M. Brosi, C. Koos, L. C. Andreani, P. Dumon, R. Baets, J. Leuthold, W. Freude, 100 Gbit/s / 1 V Optical Modulator with Slotted Slow-Light Polymer-Infiltrated Silicon Photonic Crystal, 2008 Slow and Fast Light Topical Meeting, United States, p.SWC3 doi:10.1364/sl.2008.swc3 (2008)  Download this Publication (807KB).
    16. C. Koos, P. Vorreau, P. Dumon, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, J. Leuthold, Highly-Nonlinear Silicon Photonics Slot Waveguide, Optical Fiber Communications Conference 2008, United States, p.PDP25 (2008)  Download this Publication (3.3MB).
      National Journals

    1. W. Bogaerts, Siliciumfotonica: spelen met licht op siliciumchips, Nederlands Tijdschrift voor Natuurkunde, 87(5), p.25-29 (2021)  Download this Publication (4.3MB).

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